GWSPS series oil free scroll vacuum pump, also refer to as vortex pump, dry scroll pump, oil free scroll pump, oilless scroll pump, dry scroll vacuum pump, oil free scroll vacuum pump is perfectly used in semiconductor industry, photoelectric, materials, medical, energy, aerospace, analyzing instruments and vacuum systems, with the advantages of compact structure, small size, light weight and low vibration, low noise, low energy consumption, suitable for global power supply, one button start, can be frequently started and stop between atmospheric pressure and vacuum.
GEOWELL is a professional manufacturer of scroll vacuum pumps with over 20 years of field experience, the longest performance hours and the largest sales in China, GEOWELL’s GWSPS series scroll vacuum pumps are the premium choice for clean pumping technology.
- Oil free scroll vacuum pump
GWSPS Oil free Scroll Vacuum Pump
100% No-Oil Clean Vacuum Description:
Zero oil back-diffusion or mist exhaust, purpose-built for analytical instruments and freeze dryers.
Compact Single-Sided Design Description :
Smaller footprint variant of the GWSP line without sacrificing pumping range (3–60 m³/h, 1–8 Pa).

Low Vibration, Low Noise Description:
57–63 dB(A) smooth operation, suited to noise-sensitive lab environments.

Easy, Low-Cost Upkeep Description:
No water cooling or daily oil maintenance — built for over 20 years of proven field reliability.
Features and Benefits
100% no oil clean vacuum
No oil back-diffusion, no oil mist exhaust, provide clean vacuum environment
Wide product lineup
Pumping speed covers3~60m3/h, limited vacuum level 1~8 Pa
Suitable for all type of power supply around the world
110/220/380/460v, 50/60Hz for choose
Low vibration, low noise
57~63 dB(A), smooth operation
High efficiency, ease of maintenance
No water cooled, no oil lubricated, no daily maintenance
Applications
Semiconductor industry
Vacuum sputtering machine.
IC plasma cleaning machine.
IC plasma polishing machine.
IC packaging machine.
IC transmission chamber.
Photoelectric industry
LED vacuum annealing furnace.
Load lock/transfer chambers.
Glove box.
LED packaging machine.
Liquid crystal injection and packaging.
Material industry
Vacuum annealing furnace.
Vacuum diffusion oven.
3D metal printing.
Single crystal growth furnace.
Microwave cleaning and microwave drying machine.
E-beam/Laser melting.
Vacuum degassing. Vacuum gas substitution.
Food and drug industry
Freezing dry. Vacuum storage.
Medical equipment
Low temperature plasma sterilizer.
Vacuum storage.
Dental equipment.
Energy industry
SF 6 Gas recovery machine.
Lithium battery drying and packaging machine.
Analyzing instrument and device
Spectroscopy/scanning electron microscopy
Space environment simulation machine
Helium Leak detector
Mass spectrometer
Cryopump regeneration
Accelerators / synchrotrons
Vacuum equipment
Oil free ultrahigh vacuum unit
Oil free vacuum unit
Request a Quote
- 99A-18, Chuangxin 1st Road, Hunnan District, Shenyang, China 110169
- sales@geowellscroll.com
- +86-13644904879
Why Choose This Product?
Engineered for reliability and built to perform. This product is designed to solve real challenges, reduce downtime, and deliver long-term value.
Reduce Downtime
Lower Operating Costs
Designed to reduce maintenance needs and extend equipment life, saving you money.
Built For Reliability
High-quality materials and precision engineering ensure consistent performance.
Improve Productivity
Reliable performance leads to better efficiency and higher overall productivity.


